Effect of Deposition Temperature on Self-Catalyzed ZnO Nanorods via Chemical Vapour Deposition Method

Shafinaz Sobihana Shariffudin, Puteri Sarah Mohamad Saad, Hashimah Hashim, Mohamad Hafiz Mamat


The morphological, structural, optical and electrical properties of ZnO nanorods are investigated as a function of deposition temperature. The ZnO nanorods were grown on ZnO seed catalyst layer at temperatures between 750oC – 825oC using thermal chemical vapour deposition method.  Sample deposited at 825oC showed the highest crystalline orientation. The FE-SEM micrographs and the intense peak along (002) direction in the XRD spectra of this sample implied that the nanorods possess c-axis orientation. PL spectra showed two common ZnO peaks which centered at 380 nm and 540 nm. Two-point probe I-V measurement revealed ohmic behaviour with the gold metal contact, whereby the current increase with the deposition temperature.


ZnO nanorods; CVD method; Temperature; Self-catalyzed

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DOI: http://doi.org/10.11591/ijeecs.v11.i1.pp209-214


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