Effects of Non-Uniform Channel Geometry on Double-Gate MOSFET Performance

Xu Huifang, Dai Yuehua, Zheng Changyong, Xu Jianbin, Yang Jin, Dai Guangzhen


A Double-gate (DG) MOSFET with non-uniform channel (NUC) geometry, that is, the silicon thickness of embedded in double-gate is varied linearly from drain to source, is proposed. To quantitatively assess the effects of the NUC geometry on electrical characteristics of DG MOSFETs, the short-channel effects (SCEs) and the on-state current are numerically calculated for the device with different non-uniform channel thickness, channel length and gate oxide thickness respectively. To the proposed structure, the SCEs are suppressed, the subthreshold swing becomes smaller and the on-state current is significantly improved when the thickness of silicon lied at source becomes thinner, showing better performances than the conventional DG MOSFETs.


double gate MOSFETs, non-uniform channel geometry, short-channel effects, on-state current.

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DOI: http://doi.org/10.11591/ijeecs.v12.i10.pp7186-7190
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